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Back to topOptical Measurement of Surface Topography (Paperback)
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Description
Introduction to surface texture measurement.- Some common terms and definitions.- Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy.- Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.- Coherence scanning interferometry.- Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods
About the Author
Professor Richard Leach works at National Physical Laboratory, Teddington, UK, since 1990. He is a visiting Professor of the Wolfson School for Mechanical and Manufacturing Engineering, Loughborough University. His current position is Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovation Division. He is the lead scientist on three DIUS National Measurement System Engineering Measurement Programme projects: areal surface texture and structured surfaces metrology, development of low force transfer artefacts and probes for micro-coordinate measuring machines. He is also lead scientist on projects funded by DIUS Measurement for Innovators (MfI), EPSRC and EU. Professor Leach is the Measurement Service Manager for the Engineering Nanometrology Measurement Service at NPL.